Akademik Veri Yönetim Sistemi
11th IEEE Sensors Conference, Taipei, Tayvan, 28 - 31 Ekim 2012, ss.1573-1576
Nanosized SnO2 based sensors are widely used for gas sensing applications because of their low operating temperature and high surface area. SnO2 films are conventionally deposited by chemical vapor deposition, evaporation, sol-gel and sputtering which are very expensive, time consuming processes and complex. In contrast, electrophoretic deposition (EPD) is simple, cost effective which makes it possible to fabricate reliable porous coatings. The aim of this work is to deposit porous and homogenous SnO2 films by using EPD and to investigate the surface morphology of the films for gas sensor production. In this study nanosized SnO2 (60nm) particles were used in non-aqueous mediums with and without iodine to prepare stabilized EPD suspension. Homogeneous and porous film layers were processed and analyzed at various time and voltages. The results showed that highly porous, crack free and homogeneous SnO2 films on Pt coated alumina substrate were achieved for 5 and 15 seconds at 100V EPD parameters. Optimum sintering between the SnO2 nanoparticles was observed at 500 degrees C. Deposited film thickness of 5 mu m was measured by scanning electron microscopy. According to initial results, EPD deposited SnO2 films showed high sensitivity to liquified petroleum gas (LPG) at various gas concentration and operation temperature.